Rapid thermal annealing of high-melting-point films on low-melting-point substrates

Authors :: Rosenberg, Sara E.
Wong, Peter Y.
Miaoulis, Ioannis N.
Source :: IEEE Transactions on Semiconductor Manufacturing. May, 1996, Vol. 9 Issue 2, p249, 8 p.
Publication Year :: 1996

Subjects :: Thin films -- Production processes
Annealing -- Evaluation
Microstructure -- Analysis
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