On-axis dc sputtering YBa2Cu3O(7-x) films up to 2' in diameter for microwave antenna arrays

Authors :: Muller, G.
Aschermann, B.
Chaloupka, H.
Diete, W.
Getta, M.
Hein, M.
Hensen, S.
Hill, F.
Lenkens, M.
Orbach-Werbig, S.
Patzelt, T.
Rembesa, J.
Piel, H.
Schlick, H.
Unshelm, T.
Wagner, R.
Source :: IEEE Transactions on Applied Superconductivity. June, 1995, Vol. 5 Issue 2, p1729, 4 p.
Publication Year :: 1995
Abstract: A planar system for on-axis dc sputtering of epitaxial YBa2Cu3O(7-x) (YBCO) thin films on LaAlO3 substrates with diameters of up to two inches at high oxygen pressure is described. In addition, inductive and microwave test systems for evaluating the quaity of unpatterned YBCO films are discussed. The planar system, which yields unpatterned YBCO films with low surface resistance, has been used to fabricate YBCO films for a microwave diplexer. The latter was patterned by the process of photolithography, ion milling, and wet etching.

Subjects :: Yttrium barium copper oxides -- Research
High temperature superconductors -- Research
Business
Electronics
Electronics and electrical industries

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