Polysilicon films of high photoresponse, obtained by vacuum annealing of aluminum capped hydrogenated amorphous silicon

Authors :: Sridhar, Nagarajan
Chung, D.D.L.
Anderson, W.A.
Coleman, J.
Source :: Journal of Applied Physics. Dec 15, 1995, Vol. 78 Issue 12, p7304, 9 p.
Publication Year :: 1995

Subjects :: Polysilicon -- Research
Amorphous semiconductors -- Research
Semiconductor films -- Research
Hydrogenation -- Research
Annealing -- Research
Physics

Tools