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A new effective method for thermal annealing of magnetic tunnel junctions in air with protective overlayers

Authors :
Pong, Philip W.T.
Schmoueli, Moshe
Feifei Li
Egelhoff, William F.
Source :
Journal of Applied Physics. April 1, 2008, Vol. 103 Issue 7, 07E937-1-07E937-3
Publication Year :
2008

Abstract

A new method is developed for thermal annealing of magnetic tunnel junctions (MTJs) in air with protective overlayers that has increased the tunneling magnetoresistance (TMR) values of the junctions. The [Al.sub.2][O.sub.3] MTJ samples are protected from oxidation by using Au/Ru, or [Al.sub.2][O.sub.3] films as protective overlayers.

Details

Language :
English
ISSN :
00218979
Volume :
103
Issue :
7
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.180678880