Deposition and analysis of silicon clusters generated by laser-induced gas phase reaction

Authors :: Ehbrecht, M.
Ferkel, H.
Huisken, F.
Holz, L.
Polivanov, Yu. N.
Smirnov, V.V.
Stelmakh, O.M.
Schmidt, R.
Source :: Journal of Applied Physics. Nov 1, 1995, Vol. 78 Issue 9, p5302, 5 p.
Publication Year :: 1995

Subjects :: Semiconductors -- Research
Carbon dioxide lasers -- Usage
Silicon crystals -- Research
Scanning electron microscopes -- Usage
Physics

Tools