Effect of [N.sub.2], Ar and [O.sub.2] plasma treatments on surface properties of metals

Authors :: Soo Young Kim
Kihyon Hong
Kisoo Kim
Hak Ki Yu
Woong-Kwon Kim
Jong-Lam Lee
Source :: Journal of Applied Physics. April 1, 2008, Vol. 103 Issue 7, 076101-1-076101-3
Publication Year :: 2008
Abstract: The effect of [N.sub.2], Ar and [O.sub.2] plasma treatments on the surface properties of metals is described. Synchrotron radiation photoemission spectroscopy has showed that the work function has increased after [N.sub.2], Ar and [O.sub.2] plasma treatments in sequence, which is due to the reduction of carbon atoms and the formation of O-rich surface in [O.sub.2] plasma case.

Subjects :: Argon -- Chemical properties
Degassing of metals -- Optical properties
Degassing of metals -- Mechanical properties
Metals -- Optical properties
Metals -- Mechanical properties
Plasma (Ionized gases) -- Research
Spectrum analysis -- Usage
Physics

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