Effects of dry etching damage removal on low-temperature silicon selective epitaxial growth

Subjects

Subjects :

Epitaxy -- Methods
Semiconductors -- Etching
Scanning electron microscopes -- Usage
Transmission electron microscopes -- Usage
Physics

Details

ISSN :

00218979

Volume :

78

Issue :

7

Database :

Gale General OneFile

Journal :

Journal of Applied Physics

Publication Type :

Academic Journal

Accession number :

edsgcl.17786836