Compositional dependence of the elastic constants of dilute Ga[As.sub.1-x][N.sub.x] alloys

The velocity of surface acoustic waves (SAW) as a function of composition of Ga[As.sub.1-x][N.sub.x]/GaAs(100) epilayers grown by organometallic vapor phase epitaxy was determined by using high-resolution Brillouin spectroscopy experiments. The approximation of a linear compositional dependence of the Ga[As.sub.1-x][N.sub.x] elastic constants could be used for stress evaluation in Ga[As.sub.1-x][N.sub.x] epilayers.