Evaluating reliance level of a virtual metrology system

MLA

Cheng, Fan-Tien, et al. “Evaluating Reliance Level of a Virtual Metrology System.” IEEE Transactions on Semiconductor Manufacturing, vol. 21, no. 1, Feb. 2008, p. 92. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.175444038&authtype=sso&custid=ns315887.

APA

Cheng, F.-T., Chen, Y.-T., Su, Y.-C., & Zeng, D.-L. (2008). Evaluating reliance level of a virtual metrology system. IEEE Transactions on Semiconductor Manufacturing, 21(1), 92.

Chicago

Cheng, Fan-Tien, Yeh-Tung Chen, Yu-Chuan Su, and Deng-Lin Zeng. 2008. “Evaluating Reliance Level of a Virtual Metrology System.” IEEE Transactions on Semiconductor Manufacturing 21 (1): 92. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.175444038&authtype=sso&custid=ns315887.