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The effects of a small transverse magnetic field upon a capacitively coupled RF discharge

Authors :
Hutchinson, D.A.W.
Turner, M.M.
Doyle, R.A.
Hopkins, M.B.
Source :
IEEE Transactions on Plasma Science. August, 1995, Vol. 23 Issue 4, p636, 8 p.
Publication Year :
1995

Details

ISSN :
00933813
Volume :
23
Issue :
4
Database :
Gale General OneFile
Journal :
IEEE Transactions on Plasma Science
Publication Type :
Academic Journal
Accession number :
edsgcl.17438892