Structural and dielectric properties of spin-on barium-strontium titanate thin films

Analysis of barium-strontium titanate (Ba0.5Sr0.5)TiO3 thin film capacitors developed by a spin-on technique suggests that the films have a dielectric constant of 22 to 151 at 1 MHz at room temperature. In the frequency range 10 Hz-10 MHz, the films display semicircular behavior suggestive of current leakage, which varies with the dielectric constant. The film porosity and structure are influenced by annealing temperature and thermal exposure time.