Microstructures of low-temperature-deposited polycrystalline silicon with micrometer grains

Subjects

Subjects :

Crystals at low temperatures -- Research
Microstructure -- Analysis
Polycrystalline semiconductors -- Analysis
Physics

Details

ISSN :

00218979

Volume :

77

Issue :

12

Database :

Gale General OneFile

Journal :

Journal of Applied Physics

Publication Type :

Academic Journal

Accession number :

edsgcl.17103543