Superconducting Mg[B.sub.2] nanostructures fabricated by electron beam lithography

Authors :: Monticone, E.
Portesi, C.
Borini, S.
Taralli, E.
Rajteri, M.
Source :: IEEE Transactions on Applied Superconductivity. June, 2007, Vol. 17 Issue 2, p222, 3 p.
Publication Year :: 2007
Abstract: The fabrication of Mg[B.sub.2] meander lines with width ranging from 250 to 500 nm by using electron beam lithography (EBL)-based technique which were observed to maintain good superconducting properties are reported.

Subjects :: Lithography, Electron beam -- Usage
Integrated circuit fabrication -- Analysis
Magnesium compounds -- Electric properties
Integrated circuit fabrication
Business
Electronics
Electronics and electrical industries

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