Back to Search
Start Over
Crystal structure and band gap determination of Hf[O.sub.2] thin films
- Source :
- Journal of Applied Physics. March 1, 2007, Vol. 101 Issue 5, p054101-1, 8 p.
- Publication Year :
- 2007
-
Abstract
- Valence electron energy loss spectroscopy (VEELS) and high resolution transmission electron microscopy (HRTEM) are performed to investigate different Hf[O.sub.2] thin films grown on Si (001). The results have shown that VEELS is a relevant tool to access structural, chemical and electronic properties at a subnanometer scale, when it is performed in a high resolution transmission electron microscope.
- Subjects :
- Dielectric films -- Structure
Dielectric films -- Chemical properties
Dielectric films -- Atomic properties
Thin films -- Structure
Thin films -- Chemical properties
Thin films -- Atomic properties
Transmission electron microscopes -- Usage
Crystals -- Structure
Crystals -- Research
Physics
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 101
- Issue :
- 5
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.165090367