A micromachined ultra-thin-film gas detector

A second-generation gas detector applicable to a multi-element gas analyzer uses a micro-machined ultra-thin film and is also suitable for using conventional thin films. The highly planar upper surface of the detector structure eliminates step coverage problems and the use of single-crystal boron-doped sensing and heating resistors enables the measurement of average temperatures within plus or minus 0.1 degrees Celsius. A circuit simulator SPICE helps the simultaneous measurement of electrical and thermal performance of the detector.