Effect of thickness on structural, electrical, and optical properties of ZnO: Al films deposited by pulsed laser deposition

The influence of thickness on structural, electrical, and optical properties of ZnO:Al (AZO) films are investigated by depositing a set of polycrystalline AZO samples with different thickness by pulsed laser deposition. The analysis has shown that photoluminescence spectra of AZO films are fitted well by seven emissions and the emission around 2.82 eV can be assigned to N-deep-level related recombination.