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A better solution for dry etch wastes
- Source :
- Solid State Technology. May, 1994, Vol. 37 Issue 5, p58, 2 p.
- Publication Year :
- 1994
-
Abstract
- Although the house exhaust system at NEC Electronics' Roseville, CA, fab has the capability of neutralizing etch by-products, dry etch processes generate large amounts of particulates and condensable materials, which […]
Details
- Language :
- English
- ISSN :
- 0038111X
- Volume :
- 37
- Issue :
- 5
- Database :
- Gale General OneFile
- Journal :
- Solid State Technology
- Publication Type :
- Periodical
- Accession number :
- edsgcl.15500239