Direct structural evidences of Mn dilution in Ge

Authors :: Ottaviano, L.
Passacantando, M.
Verna, A.
Priolo, F.
Gunnella, R.
Impellizzeri, G.
Principi, E.
Cicco, A. Di
Source :: Journal of Applied Physics. Sept 15, 2006, Vol. 100 Issue 6, p063528-1, 4 p.
Publication Year :: 2006
Abstract: The structural properties of [Mn.sub.x][Ge.sub.1-x] ion implanted alloys at 240 and 270 degree Celsius are studied using X-ray diffraction, transmission electron microscopy, extended X-ray absorption fine structure spectroscopy, and X-ray photoemission spectroscopy. The average efficiency of Mn dilution of ion implantation technique is found to be 50%, which reached a peak value of 100% in the subsurface implanted layer.