Acoustic method of investigating the material properties and humidity sensing behavior of polymer coated piezoelectric substrates

Authors :: Caliendo, Cinzia
Source :: Journal of Applied Physics. Sept 1, 2006, Vol. 100 Issue 5, 054508-1-054508-8
Publication Year :: 2006
Abstract: The water vapor sensitivity of polymer coated piezoelectric substrates is analyzed with regard to different types and crystallographic orientations of the substrates. The study of the surface acoustic waves (SAW) propagation along polymer coated single crystal and polycrystalline piezoelectric substrates is used as an experimental tool for thin film characterization.

Subjects :: Piezoelectric devices -- Acoustic properties
Piezoelectric devices -- Electric properties
Dielectric films -- Acoustic properties
Dielectric films -- Electric properties
Thin films -- Acoustic properties
Thin films -- Electric properties
Physics

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