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Semiconductor wafer representation for TCAD

Authors :
Giles, Martin D.
Boning, Duane S.
Chin, Goodwin R.
Dietrich, Walter C., Jr.
Karasick, M.S.
Law, Mark E.
Mozumder, Purnendu K.
Nackman, Lee R.
Rajan, V.T.
Walker, D.M.H.
Wang, Robert H.
Wong, Alexander S.
Source :
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems. Jan, 1994, Vol. v13 Issue n1, p82, 14 p.
Publication Year :
1994

Subjects

Subjects :
Computer-aided design -- Innovations
Semiconductor wafers -- Usage
Computer simulation -- Methods

Details

ISSN :
02780070
Volume :
v13
Issue :
n1
Database :
Gale General OneFile
Journal :
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
Publication Type :
Academic Journal
Accession number :
edsgcl.15245614

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