Fabrication of distributed electrostatic micro actuator (DEMA)

A distributed electrostatic micro actuator (DEMA) has been proposed. The actuator has many small driving units which consist of two wave-like insulated electrodes. Both ends of insulated electrodes are connected to each other, and the driving unit has narrow gap for deformation caused by electrostatic forces. The driving units have large area of electrodes and are distributed in series and in parallel. So, a strong electrostatic force can be obtained, and the deformation and the generated force of the actuator would be large. Macro model of the DEMA was fabricated with polyimide films, and the deformation of the actuator was measured. When the applied voltage was 200 V, the deformation ratio was 36%. A micro actuator was fabricated by use of photolithography and electroplating. The displacement of 28 micrometer was observed when applied voltage was 160 V. Experimental results of the micro actuator were compared with the results simulated by finite element method (FEM) analysis.