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Single-wafer processing tools for agile semiconductor production
- Source :
- Solid State Technology. January, 1994, Vol. 37 Issue 1, p35, 8 p.
- Publication Year :
- 1994
-
Abstract
- Total use of single-wafer processing for fast-cycle-time IC production avoids the high costs and rigidity of traditional batch processing. A flexible prototype single-wafer mini-factory contains 34 single-wafer processors with various […]
- Subjects :
- Integrated circuit fabrication
Integrated circuit fabrication -- Methods
Subjects
Details
- Language :
- English
- ISSN :
- 0038111X
- Volume :
- 37
- Issue :
- 1
- Database :
- Gale General OneFile
- Journal :
- Solid State Technology
- Publication Type :
- Periodical
- Accession number :
- edsgcl.15155946