The impact of the density and type of reactive sites on the characteristics of the atomic layer deposited W[N.sub.x][C.sub.y] films

The growth of tungsten nitride carbide W[N.sub.x][C.sub.y] films obtained from layer deposition using triethylboron, tungsten hexafluoride, and ammonia precursors is determined by the density and type of reactive sites. A transient regime is not observed for W[N.sub.x][C.sub.y] growth on hydrogen-terminated silicon with the initial growth being dominated by the reduction of tungsten hexafluoride to tungsten.