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Broadband multilayer polarizers for the extreme ultraviolet
- Source :
- Journal of Applied Physics. March 1, 2006, Vol. 99 Issue 5, p056108-1, 3 p.
- Publication Year :
- 2006
-
Abstract
- Nonperiodic molybdenum/silicon broadband multilayer polarizers are designed using numerical optimization algorithm and fabricated using direct current magnetron sputtering. The multilayer polarizers show a high s reflectivity and polarization over a broad angular range at fixed wavelength.
- Subjects :
- Polarizers (Light) -- Mechanical properties
Wavelength -- Research
Physics
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 99
- Issue :
- 5
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.146412482