Influence of pulse duration on the plasma characteristics in high-power pulsed magnetron discharges

Authors :: Konstantinidis, S.
Dauchot, J.P.
Ganciu, M.
Ricard, A.
Hecq, M.
Source :: Journal of Applied Physics. Jan 1, 2006, Vol. 99 Issue 1, p013307-1, 5 p.
Publication Year :: 2006
Abstract: The plasma is studied by time-resolved optical emission and absorption spectroscopies and the deposition rate is controlled. The pulse length is varied between 2.5 and 20 mus at 2 and 10 mTorr in pure argon.

Subjects :: Plasma diagnostics -- Methods
Titanium compounds -- Electric properties
Electric discharges -- Analysis
Electric discharges through gases -- Analysis
Physics

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