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The formation mechanism of aluminum oxide tunnel barriers: Three-dimensional atom probe analysis
- Source :
- Journal of Applied Physics. Dec 15, 2005, Vol. 98 Issue 12, p124904-1, 6 p.
- Publication Year :
- 2005
-
Abstract
- Atomic-resolution three-dimensional visualization of a simple magnetic tunnel junction (MTJ) is achieved using three-dimensional atom probe (2DAP) analysis and cross-sectional high-resolution electron microscopy (HREM). The atomic-resolution is achieved in order to obtain chemical information and morphology across the tunnel barrier and to allow the initial mechanisms of the oxidation process to be understood.
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 98
- Issue :
- 12
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.145507463