Interconnect capacitance characterization using charge-injection-induced error-free (cief) charge-based capacitance measurement (CBCM)

In this work, we describe a novel operation of charge-injection-induced error-free charge-based capacitance measurement (CIEF CBCM) method. This method has the simplest test structure among various CBCM methods by using only one N/PMOS pair. CIEF CBCM has the advantage of being free from charge-injection-induced errors and of efficient layout area usage. It is very suitable for industrial applications for large amounts of accurate capacitance characterizations with a limited layout area. Besides, ClEF CBCM is also implemented for investigating the impact of floating dummy metal fills on interconnect capacitance directly from silicon data. Index Terms--Capacitance measurement, charge-based capacitance measurement (CBCM), charge injection, interconnect capacitance.