Determination of zinc cluster size in ionized cluster beam film deposition

Authors :: Urban, Frank K., III
Feng, Susan W.
Nainaparampil, Josekutty J.
Source :: Journal of Applied Physics. July 15, 1993, Vol. 74 Issue 2, p1335, 4 p.
Publication Year :: 1993
Abstract: Thin films are grown by a beam of ionized, accelerated atom clusters in the ionized cluster beam deposition. Since earlier attempts that used one millimeter by one millimeter nozzles at a crucible pressure of two Torr were unsuccessful, a converging-diverging nozzle 18 millimeters long, with a diameter of 0.4 millimeters, and a crucible pressure in the 1000 Torr range were used. This yielded considerable numbers of large zinc clusters.