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A substrate heater with fast response for a low current ion-implanter

Authors :
Swart, Pieter L.
Lacquet, Beatrys M.
Reynecke, Stephanus
Source :
IEEE Transactions on Nuclear Science. June, 1993, Vol. 40 Issue 3, p262, 4 p.
Publication Year :
1993

Subjects

Subjects :
Ion implantation -- Research
Electric lamps -- Usage
Heating -- Equipment and supplies
Business
Electronics
Electronics and electrical industries

Details

ISSN :
00189499
Volume :
40
Issue :
3
Database :
Gale General OneFile
Journal :
IEEE Transactions on Nuclear Science
Publication Type :
Academic Journal
Accession number :
edsgcl.14179467

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