Morphology of oxide precipitates in Czochralski silicon degenerately doped with boron

The morphological structure of oxide precipitates in boron-doped Czochralski silicon was investigated using transmission electron microscopy. The results showed that the oxide precipitates featured a disk-shaped structure with both (110)- and (111)-type habit planes. This indicated the possibility that localized reduction in the elastic moduli of silicon could facilitate the formation of disk-shaped precipitates on other planes.