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Fabrication development for nanowire GHz-counting-rate single-photon detectors

Authors :
Yang, Joel K.W.
Dauler, Eric
Ferri, Antonin
Pearlman, Aaron
Verevkin, Aleksandr
Gol'tsman, Gregory
Voronov, Boris
Sobolewski, Roman
Keicher, William E.
Berggren, Karl K.
Source :
IEEE Transactions on Applied Superconductivity. June, 2005, Vol. 15 Issue 2, p626, 5 p.
Publication Year :
2005

Abstract

A fabrication process for GHz-counting-rate, single-photon, high-detection-efficiency, NbN, nanowire detectors is developed. Two processes for the device patterning, one based on the standard polymethylmethacrylate (PMMA) organic positive-tone electron-beam resist, and the other based on the newer hydrogen silsesquioxane (HSQ) negative-tone spin-on-glass resist are demonstrated.

Subjects

Subjects :
Nanotechnology -- Research
Nitrides -- Electric properties
Niobium -- Electric properties
Photon detectors -- Design and construction
Business
Electronics
Electronics and electrical industries

Details

Language :
English
ISSN :
10518223
Volume :
15
Issue :
2
Database :
Gale General OneFile
Journal :
IEEE Transactions on Applied Superconductivity
Publication Type :
Academic Journal
Accession number :
edsgcl.135955842

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