Real time spectroscopic ellipsometry characterization of the nucleation of diamond by filament-assisted chemical vapor deposition

Real time spectroscopic ellipsometry (SE) was used to characterize diamond nucleation by filament assisted chemical vapor deposition. The use of SEin turn led to improved control over interface contamination, substrate temperature and nuclei induction time. In addition, SE monitors interface structure and mass thickness evolution associated with the discontinuous particle film. The results show the effectivity of the use of ellipsometric methods for thin film nucleation characterization.