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S/D extension formation for sub-65nm transistors

Authors :
Foad, Majeed
Graoui, Houda
Source :
Solid State Technology. July, 2005, Vol. 48 Issue 7, p95, 3 p.
Publication Year :
2005

Abstract

OVERVIEW The increasing demand for high-performance computers and the widespread use of more complex consumer products continue to fuel the scaling of leading-edge logic devices. In particular, CMOS FETs must […]

Details

Language :
English
ISSN :
0038111X
Volume :
48
Issue :
7
Database :
Gale General OneFile
Journal :
Solid State Technology
Publication Type :
Periodical
Accession number :
edsgcl.134625345