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S/D extension formation for sub-65nm transistors
- Source :
- Solid State Technology. July, 2005, Vol. 48 Issue 7, p95, 3 p.
- Publication Year :
- 2005
-
Abstract
- OVERVIEW The increasing demand for high-performance computers and the widespread use of more complex consumer products continue to fuel the scaling of leading-edge logic devices. In particular, CMOS FETs must […]
Details
- Language :
- English
- ISSN :
- 0038111X
- Volume :
- 48
- Issue :
- 7
- Database :
- Gale General OneFile
- Journal :
- Solid State Technology
- Publication Type :
- Periodical
- Accession number :
- edsgcl.134625345