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Fabrication and assembly of 3D MEMS devices
- Source :
- Solid State Technology. July, 2005, Vol. 48 Issue 7, p38, 3 p.
- Publication Year :
- 2005
-
Abstract
- The ability to integrate mechanical elements with supporting electronics on a micro scale has bolstered micro-electromechanical systems (MEMS) as an enabling technology, sparking interest in an impressive range of applications. […]
Details
- Language :
- English
- ISSN :
- 0038111X
- Volume :
- 48
- Issue :
- 7
- Database :
- Gale General OneFile
- Journal :
- Solid State Technology
- Publication Type :
- Periodical
- Accession number :
- edsgcl.134625338