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Enhanced photoluminescence from porous silicon by hydrogen-plasma etching

Authors :
Q. Wang
C.Z. Gu
J.J. Li
Z.L. Wang
K. Zhu
C.Y. Shi
Y.L. Liu
P. Xu
Source :
Journal of Applied Physics. May 1, 2005, Vol. 97 Issue 9, 093501-1-093501-4
Publication Year :
2005

Abstract

Porous silicon (PS) was etched by hydrogen plasma where on the surface a large number of silicon nanocone arrays and nanocrystallines were formed. It is found that the photoluminescence of the H-etched porous silicon is highly enhanced.

Details

Language :
English
ISSN :
00218979
Volume :
97
Issue :
9
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.134232849