Optimized kinoform structures for highly efficient fan-out elements

We discuss the realization of highly efficient fan-out elements. Laser-beam writing lithography is available now for fabricating smooth surface relief microstructures. We develop several methods for optimizing microstructure profiles. Only a small number of parameters in the object plane are necessary for determining the kinoform. This simplifies the calculation of M x N arrays also for large M and N. Experimental results for a 9-beam fan-out element are presented.