Back to Search
Start Over
Tech note diffractive MEMS in spectroscopy: MEMS are small, microfabricated devices that are finding application in a variety of industries in both analytical and manufacturing settings. This paper reviews the properties of diffractive MEMS devices and examines their application in chemical spectroscopy
- Source :
- Spectroscopy. April, 2005, Vol. 20 Issue 4, p24, 5 p.
- Publication Year :
- 2005
-
Abstract
- The MEMS acronym, short for micro-electro-mechanical systems, evokes a vision of tiny machines (microsystems) that move. Indeed, a breathtaking array of microfabricated devices already is available commercially, and many more […]
Details
- Language :
- English
- ISSN :
- 08876703
- Volume :
- 20
- Issue :
- 4
- Database :
- Gale General OneFile
- Journal :
- Spectroscopy
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.132847898