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Diamondlike carbon film deposition on a polycarbonate-tube inner wall using a cylindrical electrode with radio frequency glow discharge plasma

Authors :
Hirakuri, Kenji K.
Ohgoe, Yasuharu
Source :
Journal of Applied Physics. Jan 15, 2005, Vol. 97 Issue 2, p024906-1, 5 p.
Publication Year :
2005

Abstract

A cylindrical electrode plasma process is developed to deposit diamondlike carbon (DLC) films on a polycarbonate-tube inner wall. The distribution of film thickness was observed to be 300-350nm and the structures of the DLC film were uniform.

Details

Language :
English
ISSN :
00218979
Volume :
97
Issue :
2
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.132835820