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Diamondlike carbon film deposition on a polycarbonate-tube inner wall using a cylindrical electrode with radio frequency glow discharge plasma
- Source :
- Journal of Applied Physics. Jan 15, 2005, Vol. 97 Issue 2, p024906-1, 5 p.
- Publication Year :
- 2005
-
Abstract
- A cylindrical electrode plasma process is developed to deposit diamondlike carbon (DLC) films on a polycarbonate-tube inner wall. The distribution of film thickness was observed to be 300-350nm and the structures of the DLC film were uniform.
- Subjects :
- Electrodes -- Research
Electrodes -- Electric properties
Physics
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 97
- Issue :
- 2
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.132835820