Determination of the growth strain of LPCVD polysilicon

MLA

Wang, Yuping, et al. “Determination of the Growth Strain of LPCVD Polysilicon.” Journal of Microelectromechanical Systems, vol. 14, no. 1, Feb. 2005, p. 160. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.128868894&authtype=sso&custid=ns315887.

APA

Wang, Y., Ballarini, R., Kahn, H. D., & Heuer, A. H. (2005). Determination of the growth strain of LPCVD polysilicon. Journal of Microelectromechanical Systems, 14(1), 160.

Chicago

Wang, Yuping, Roberto Ballarini, Harold D. Kahn, and Arthur H. Heuer. 2005. “Determination of the Growth Strain of LPCVD Polysilicon.” Journal of Microelectromechanical Systems 14 (1): 160. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.128868894&authtype=sso&custid=ns315887.