Deformation behavior of coherently strained InAs/GaAs(111)A heteroepitaxial systems: Theoretical calculations and experimental measurements

A comprehensive, quantitative analysis that combines a hierarchical theoretical approach with experimental measurements is presented of the deformation behavior of coherently strained InAs/GaAs(111)A heteroepitaxial systems. The experimental measurements are found to be in excellent agreement with the calculated lattice interplanar distances and the corresponding strain fields in the thin mechanically unconstrained substrates considered in the theoretical analysis.