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Conversion of p-type to n-type diamond by exposure to a deuterium plasma
- Source :
- Journal of Applied Physics. Dec 15, 2004, Vol. 96 Issue 12, 7060-7065
- Publication Year :
- 2004
-
Abstract
- Exposure of p-type (B doped) homopitaxial diamond layers to a deuterium plasma that can result in the formation of n-type diamond with a shallow donor state is discussed. Experimental results based on the comparison of secondary ion mass spectrometry profiles of B and D and Hall effect measurement at different temperatures are presented.
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 96
- Issue :
- 12
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.127918645