Precursors of fluorocarbon film growth studied by mass spectrometry

MLA

Teii, Kungen, et al. “Precursors of Fluorocarbon Film Growth Studied by Mass Spectrometry.” Journal of Applied Physics, vol. 87, no. 10, May 2000, p. 7185. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.127758117&authtype=sso&custid=ns315887.

APA

Teii, K., Hori, M., Goto, T., & Ishii, N. (2000). Precursors of fluorocarbon film growth studied by mass spectrometry. Journal of Applied Physics, 87(10), 7185.

Chicago

Teii, Kungen, Masaru Hori, Toshio Goto, and Nobuo Ishii. 2000. “Precursors of Fluorocarbon Film Growth Studied by Mass Spectrometry.” Journal of Applied Physics 87 (10): 7185. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.127758117&authtype=sso&custid=ns315887.