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SVGL to tie Micrascan II, SVG track, IBM resist under Sematech pact
- Source :
- Electronic News (1991). August 10, 1992, Vol. 38 Issue 1924, p13, 2 p.
- Publication Year :
- 1992
-
Abstract
- WILTON, CONN.--Under terms of a new Sematech contract, SVG Lithography Systems (SVGL) will set up a high-volume 'lithography cell' integrating its Micrascan II step-and-scan tool with a Silicon Valley Group […]
- Subjects :
- Semiconductor industry
Semiconductor production equipment
Company business planning
Company product planning
International Business Machines Corp. -- Product information -- Planning
SVG Lithography Systems Inc. -- Planning -- Product information
SEMATECH -- Planning
SVG Lithography Systems Micrascan II (Semiconductor production equipment) -- Usage
Semiconductor industry -- Planning -- Product information
Semiconductor production equipment -- Usage -- Product information
Subjects
Details
- Language :
- English
- ISSN :
- 10616624
- Volume :
- 38
- Issue :
- 1924
- Database :
- Gale General OneFile
- Journal :
- Electronic News (1991)
- Publication Type :
- Periodical
- Accession number :
- edsgcl.12580869