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Modeling and regrowth mechanisms of flash lamp processing of SiC-on-silicon heterostructures
- Source :
- Journal of Applied Physics. Nov 1, 2004, Vol. 96 Issue 9, p4843, 9 p.
- Publication Year :
- 2004
-
Abstract
- The study describes the development of a thermal model for flash lamp processing of 3C-SiC on silicon substrates in the millisecond regime, the FLASiC process. The kinetics of melting and regrowth is also considered.
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 96
- Issue :
- 9
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.125379556