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Modeling and regrowth mechanisms of flash lamp processing of SiC-on-silicon heterostructures

Authors :
Smith, M.
McMahon, R.A.
Voelskow, M.
Skorupa, W.
Source :
Journal of Applied Physics. Nov 1, 2004, Vol. 96 Issue 9, p4843, 9 p.
Publication Year :
2004

Abstract

The study describes the development of a thermal model for flash lamp processing of 3C-SiC on silicon substrates in the millisecond regime, the FLASiC process. The kinetics of melting and regrowth is also considered.

Details

Language :
English
ISSN :
00218979
Volume :
96
Issue :
9
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.125379556