Three modes in a radio frequency atmospheric pressure glow discharge

Authors :: Shi, J.J.
Deng, X.T.
Hall, R.
Punnett, J.D.
Kong, M.G.
Source :: Journal of Applied Physics. Nov 15, 2003, Vol. 94 Issue 10, p6303, 8 p.
Publication Year :: 2003
Abstract: Fundamentally not requiring a vacuum chamber, atmospheric pressure glow discharges (APGDs) offer an exciting prospect for a wide range of material processing applications. Plasma dynamics, hence plasma stability, in these three modes are influenced crucially by impedance matching between the plasma rig and the power source.