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Dynamic characteristics of dislocations of Ge-doped and (Ge+B) codoped silicon

Authors :
Yonenaga, I.
Taishi, T.
Hoshiwaka, K.
Huang, X.
Fellah, M.
Source :
Journal of Applied Physics. Jan 1, 2003, Vol. 93 Issue 1, 265-269
Publication Year :
2003

Abstract

The dynamic behavior of dislocation in heavily Ge-doped Si crystals and Ge and B codoped Si crystal has been investigated which demonstrates strong suppression of dislocation generation in Si codoped with Ge and B, while weak suppression occurs in Ge-doped Si and the critical stress increases gradually with increasing Ge concentration. This is interpreted in terms of dislocation immobilization due to the effective segregation of both Ge and B impurities.

Details

Language :
English
ISSN :
00218979
Volume :
93
Issue :
1
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.123837668