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Influence of segregation on the measurement of stress in thin films
- Source :
- Journal of Applied Physics. March 1, 2002, Vol. 91 Issue 5, p2951, 8 p.
- Publication Year :
- 2002
-
Abstract
- Influence of segregation on the measurement of stress in thin films is discussed. Surface relaxation could induce erroneous bulk stress.
- Subjects :
- Segregation -- Research
Dielectric films -- Research
Thin films -- Research
Physics
Subjects
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 91
- Issue :
- 5
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.123611458