Electron energy deposition in an electron-beam pumped KrF amplifier: impact of beam power and energy

Authors :: Petrov, G.M.
Giuliani, J.L.
Dasgupta, A.
Ferreira, C.M.
McKoy, B.V.
Morgan, W.L.
Source :: Journal of Applied Physics. March 1, 2002, Vol. 91 Issue 5, p2662, 16 p.
Publication Year :: 2002
Abstract: Electron energy distribution function (EEDF) calculated from electron Boltzmann equation is used to evaluate electron impact ionization. This approach is however limited to the regime of low power deposition.

Subjects :: Ionization -- Research
Electrons -- Optical properties
Distribution (Probability theory) -- Optical properties
Physics

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