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The role of the catalytic particle in the growth of carbon nanotubes by plasma enhanced chemical vapor deposition
- Source :
- Journal of Applied Physics. June 1, 2004, Vol. 95 Issue 11, 6387-6391
- Publication Year :
- 2004
-
Abstract
- The role of the metal particle in the formation of nanotubes synthesized by plasma enhanced chemical vapor deposition (PECVD) is discussed. It is found that varying growth temperature catalytic particles of different shape and size can be formed.
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 95
- Issue :
- 11
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.123383854