Control of plasma parameters and wall sheath voltage in radio frequency magnetron discharge by grid bias

MLA

Sirghi, L., et al. “Control of Plasma Parameters and Wall Sheath Voltage in Radio Frequency Magnetron Discharge by Grid Bias.” Journal of Applied Physics, vol. 91, no. 7, Apr. 2002, p. 4026. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.123346521&authtype=sso&custid=ns315887.

APA

Sirghi, L., Hatanaka, Y., & Popa, G. (2002). Control of plasma parameters and wall sheath voltage in radio frequency magnetron discharge by grid bias. Journal of Applied Physics, 91(7), 4026.

Chicago

Sirghi, L., Y. Hatanaka, and G. Popa. 2002. “Control of Plasma Parameters and Wall Sheath Voltage in Radio Frequency Magnetron Discharge by Grid Bias.” Journal of Applied Physics 91 (7): 4026. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.123346521&authtype=sso&custid=ns315887.